How to make the target materials?
Casting
The alloy raw material of a certain distribution ratio is melted, and the alloy solution is poured into a mold to form an ingot, and finally a target material is machined, and the casting method is smelted and cast in a vacuum. Commonly used smelting methods include vacuum induction melting, vacuum arc melting and vacuum electron bombardment smelting, etc., which have the advantages of low target impurity content (especially gas impurity content), high density, and large size; The disadvantage is that it is difficult to obtain a uniform target alloy target by ordinary smelting method for two or more metals having a large difference in melting point and density.
Powder metallurgy
The alloy material which has a certain distribution ratio is melted, cast into an ingot and then pulverized, and the powder formed by pulverization is isostatically pressed and then sintered at a high temperature to finally form a target, which has the advantage that the target component is uniform; Disadvantages are low density, high impurity content, etc. Commonly used powder metallurgy processes include cold pressing, vacuum hot pressing and hot isostatic pressing.
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