Magnetron Sputtering Technology for Material Deposition
Magnetron sputtering is a process of sputter coating, which in turn is one of the physical vapor deposition vacuum processes. The purpose of sputtering is to deposit a very thin film onto a substrate, typically using ionized gas molecules to bombard the sputtering materials, the atoms are sputtered out and then combine with the substrate to form a thin film.
In magnetron sputtering, a high voltage is delivered by a low pressure gas (typically argon) to produce a high energy plasma. Under the action of the magnetic field, the positive plasma ions are used to strike the sputtering target that supplies the coating material, and the atoms are ejected from the sputter target material and combined with the material of the substrate to form a film.
Because magnetron sputtering works at the molecular level, it can produce a more uniform and tighter pattern and project smaller particles of one material onto another, creating the thinnest, most uniform One of the most durable and cost-effective films. This process is far superior to painting and electroplating. It does not only coat or adhere to the surface material, but penetrates the surface of the material by several tens of angstroms. Therefore, the film obtained by PVD is more durable, highly adhesive, and more resistant to environmental conditions.
Magnetron sputtering technology is now widely used in a variety of technologies, and processes for deposition optics, tribology, electronics, medical and other functional coatings and surface treatments have been developed.
• Various functional films: films with special functions such as absorption, transmission, reflection, refraction and polarization. Used in decorative fields such as various total reflection and translucent films, cell phone cases and mice.
• Microelectronics: Non-thermal coating technology, mainly used for chemical vapor deposition (CVD) to obtain a uniform film with a large area.
• Optical field: IF closed field unbalanced magnetron sputtering technology has been applied to optical films (such as anti-reflective films), low-emissivity glass and transparent conductive glass.
• Mechanical processing industry: Surface deposition technology for surface functional films, superhard films and self-lubricating films. These films are effective in improving the surface hardness of the coated product, the toughness of the composite, the abrasion resistance and the high temperature chemical stability as well as the service life.